Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology
نویسندگان
چکیده
منابع مشابه
Free Vibration Analysis of a Six-degree-of-freedom Mass-spring System Suitable for Dynamic Vibration Absorbing of Space Frames
This study is concentrated on the natural frequencies and mode shapes of a simple three-member space frame coupled with a dynamic vibration absorber. The dynamic vibration absorber is modeled as a six-degree-of-freedom mass-spring system. For the first time, the free vibration of an elastic structure with a six-degree-of-freedom mass-spring system is found. Each member of the space frame has un...
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ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2016
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2016.10.534